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Chris R. Kleijn
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1.
Modeling of Chemical Vapor Deposition of Tungsten Films
By:
Chris R. Kleijn
,
Christoph Werner
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AED266
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2.
Modeling of Chemical Vapor Deposition of Tungsten Films (Progress in Numerical Simulation for Microelectronics)
By:
Kleijn, Chris R.
,
Werner, Christoph
Publisher:
Birkhauser
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AED263
Binding:
Hardcover
Release:
01-Jan-1993
Language:
English
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