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Advanced Metallization and Interconnect Systems for ULSI Applications in 1996: Volume 12
Advanced Metallization and Interconnect Systems for ULSI Applications in 1996: Volume 12
By: John Schmitz, Kazuo Tsubouchi, Hiroshi Komiyama, Robert Havemann, Hiroshi (University of Tokyo) Komiyama
Publisher: Materials Research Society
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AED104
Binding:
Hardback
Release:
01 Feb 2000
Language:
English
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