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Plasma Sources for Thin Film Deposition and Etching
Plasma Sources for Thin Film Deposition and Etching
By: Maurice H Francombe, John L. (RCA Laboratories, Princeton, New Jersey) Vossen, John L Vossen, Maurice H. (Georgia State University, Atlanta, U.S.A.) Francombe
Publisher: Academic Press
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AED714
Binding:
Hardback
Release:
18 Aug 1994
Language:
English
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