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Scaling Issues and Design of MEMS
Scaling Issues and Design of MEMS
By: Salvatore Baglio, Salvatore Castorina, Nicolo Savalli, S Baglio, Nicolo (University of Catania, Italy) Savalli
Publisher: Wiley-Interscience
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AED457
Binding:
Hardback
Release:
01 Mar 2008
Language:
English
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