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1.
Sub-Half-Micron Lithography for ULSIs
By:
Katsumi Suzuki
,
Shinji Matsui
,
Yukinori Ochiai
,
Katsumi (NEC Corporation, Tsukuba, Japan) Suzuki
,
Shinji (Nano-scale Science and Technology Group, H Matsui
Publisher:
Cambridge University Press
No Review Yet
AED665
Binding:
Hardback
Release:
01 Jun 2000
Language:
English
Available
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