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1.
Nanoparticle Engineering for Chemical-Mechanical Planarization
By:
Ungyu Paik
,
Jea-Gun Park
,
Jea-Gun (Hanyang University, Seoul, South Korea) Park
,
Ungyu (Hanyang University, Seoul, South Korea) Paik
Publisher:
CRC Press
No Review Yet
AED943
Binding:
Hardback
Release:
20 Feb 2009
Language:
English
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