Development and Assessment of Wafer Transport Sequencing Rules for Clustertools
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Development and Assessment of Wafer Transport Sequencing Rules for Clustertools

Development and Assessment of Wafer Transport Sequencing Rules for Clustertools


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About the Book

Cluster tools have become an important tool type in the semicon-ductor industry during the last decade. They integrate several process chambers into a tool and enable sequential process steps within one tool and/or increase capacity and availability by using several cham-bers in parallel for the same step. In these cluster tools, several cham-bers are usually served by one robot. Different process times and the parallelism of the chambers lead to practically random and competing transport tasks and therefore to a dynamic sequence of events. Therefore a static capacity analysis is often insufficient and the deduc-tion of improvement potentials requires complex analysis of the se-quence of transport job executions. Besides external influences like the instant of the next delivery of a lot can change the ranking of different optimization criteria and temporarily favor a different sequencing rule. Commercially available simulation programs for semiconductor cluster tools are limited in the variety of sequencing rules and do not support such an analysis to the necessary extent.


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Product Details
  • ISBN-13: 9783639032543
  • Publisher: VDM Verlag Dr. Mueller e.K.
  • Binding: Paperback
  • Language: English
  • Returnable: N
  • Weight: 199 gr
  • ISBN-10: 3639032543
  • Publisher Date: 01 Jul 2008
  • Height: 229 mm
  • No of Pages: 104
  • Spine Width: 6 mm
  • Width: 152 mm


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Development and Assessment of Wafer Transport Sequencing Rules for Clustertools
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Development and Assessment of Wafer Transport Sequencing Rules for Clustertools
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