High K Gate Dielectrics by Michel Houssa at Bookstore UAE
High K Gate Dielectrics

High K Gate Dielectrics


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About the Book

The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community.

High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.


About the Author: Michel Houssa Laboratoire Materiaux et Microelectronique de Provence, Universite de Provence, France Silicon Processing and Device Technology Division, IMEC, Belgium


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Product Details
  • ISBN-13: 9780750309066
  • Publisher: CRC Press
  • Publisher Imprint: Crc Press
  • Height: 239 mm
  • No of Pages: 614
  • Series Title: Materials Science and Engineering
  • Weight: 1217 gr
  • ISBN-10: 0750309067
  • Publisher Date: 01 Dec 2003
  • Binding: Hardback
  • Language: English
  • Returnable: N
  • Spine Width: 38 mm
  • Width: 174 mm


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