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Microscopy of Semiconducting Materials

Microscopy of Semiconducting Materials


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International Edition


About the Book

With IC technology continuing to advance, the analysis of very small structures remains critically important. Microscopy of Semiconducting Materials provides an overview of advances in semiconductor studies using microscopy. The book explores the use of transmission and scanning electron microscopy, ultrafine electron probes, and EELS to investigate semiconducting structures. It also covers specimen preparation using focused ion beam milling and advances in microscopy techniques using different types of scanning probes, such as AFM, STM, and SCM. In addition, the book discusses a range of materials, from finished devices to partly processed materials and structures, including nanoscale wires and dots.

This volume provides an authoritative reference for all academics and researchers in materials science, electrical and electronic engineering and instrumentation, and condensed matter physics.


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Product Details
  • ISBN-13: 9780750306508
  • Publisher: Institute of Physics Publishing
  • Publisher Imprint: Institute of Physics Publishing
  • Height: 242 mm
  • No of Pages: 774
  • Series Title: Institute of Physics Conference
  • Sub Title: 1999 Proceedings of the Institute of Physics Conference held 22-25 March 1999, University of Oxford, UK
  • Width: 165 mm
  • ISBN-10: 0750306505
  • Publisher Date: 01 Jan 2000
  • Binding: Hardback
  • Language: English
  • Returnable: N
  • Spine Width: 48 mm
  • Weight: 1459 gr


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