Mikrosensorik Book by Thomas Elbel - Bookswagon
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Mikrosensorik

Mikrosensorik


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About the Book

Die Mikrosensorik als Teilgebiet der Mikrosystemtechnik hat einen rasanten Aufschwung genommen. Zur Lösung der grundsätzlichen Aufgabenstellung der Sensorik - der elektrischen Messung vorwiegend nichtelektrischer Meßgrößen- wurde in den zurückliegenden 10 Jahren eine Vielzahl neuer Mikrosensoren mit zum Teil hervorragenden Sensorparametern und mit völlig neuen Anwendungsmöglichkeiten entwickelt. Das Buch will einen Einblick in dieses faszinierende Arbeitsgebiet vermitteln. Das Buch ist als Lehrbuch konzipiert. Es entstand aus meiner Gastvorlesung Thermische Sensoren/Mikrosensoren an der ETH Zürich und aus einem Skript für die Vorlesung Sensoren/Mikrosensoren an der FH Hannover. Das Buch wendet sich in erster Linie an Studierende, vor allem an Studenten elektrotechnischer Disziplinen. In der meßtechnischen Praxis und in der angewandten Forschung tätige Ingenieure können das Buch zur Einarbei- tung in die Mikrosensorik anwenden. Zum Verständnis des Buches sind keine besonderen theoretischen Vorkenntnisse erforderlich. Für Leser ohne Vorkenntnisse auf dem Gebiet der Halbleitertechnologie wurden im Kapitel 2 die für die Mikrosensorik wichtigen technologischen Verfahren wie Fotolithografie oder Silizium-Mikromechanik in knapper Form dargestellt. Für ein vertiefendes Studium dieses umfangreichen Fachgebietes wird auf die angegebene Literatur verwiesen. Nach der zusammenfassenden Beschreibung der für alle Mikrosensoren gemeinsamen techno- logischen Grundlagen werden in den Kapiteln 3 bis 7 die Sensoren mit ihrer physikalischen Wirkungsweise, ihrem technologischen Autbau und ihren wesentlichen Eigenschaften be- schrieben. Die Gliederung erfolgt nach der Art der Meßgröße.
About the Author: Prof. Dr.-Ing. Thomas Elbel lehrt an der Fachhochschule Hannover die Fachgebiete Sensorik und Meßtechnik. Er ist in der angewandten Forschung auf dem Gebiet der thermischen Mikrosensoren tätig.


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Product Details
  • ISBN-13: 9783528033774
  • Publisher: Vieweg+teubner Verlag
  • Publisher Imprint: Vieweg+teubner Verlag
  • Height: 244 mm
  • No of Pages: 176
  • Series Title: Studium Technik
  • Sub Title: Eine Einführung in Technologie Und Physikalische Wirkungsprinzipien Von Mikrosensoren
  • Width: 170 mm
  • ISBN-10: 3528033770
  • Publisher Date: 15 Oct 1996
  • Binding: Paperback
  • Language: German
  • Returnable: N
  • Spine Width: 10 mm
  • Weight: 358 gr


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