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Oberflächen- Und Dünnschicht-Technologie

Oberflächen- Und Dünnschicht-Technologie


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About the Book

Dieses Buch ist der erste Teil einer auf zwei Bande angelegten Monographie, die in der Absicht entstand, den Fachleuten, die in der Forschung oder Industrie auf den Gebie- ten der Werkstoffoberflachen und der diinnen Schichten tatig sind, sowie den Studie- renden eine EinfUhrung in die Grundlagen und eine Ubersicht iiber die vieifaltigen Anwendungen und Verfahren der Oberflachen- und Diinnschichttechnologie zu ge- ben. Diese Arbeit beruht auf einer langjahrigen Tatigkeit des Verfassers auf dies em Gebiet sowohl in der Industrie als auch an der Hochschule. In ihrem praktischen Einsatz haben technische Oberflachen und diinne Schichten eine Vielzahl von Funktionen zu erftillen. Um nur einige Beispiele zu nennen: in der Optik als reflexionsmindemde, reflexionserhohende oder absorbierende Schichten; in der Elektrotechnik als Kontakte, Widerstande und Kondensatoren; in der Mikroelek- tronik als Metallisierungs-und Passivierungsschichten fUr hochintegrierte Schaltkreise und Halbleiter-Bauelemente; femer beim Aufbau von Systemen der integrierten Op- tik, der Optoelektronik, der Kryoelektronik, der Energietechnik und der biomedizini- schen Technik. In der chemischen Verfahrenstechnik und im Maschinenbau werden funktionelle diinne Schichten als Schutz gegen VerschleiB, Korrosion und Hochtem- peraturoxidation, aber auch als reibungsarme Schichten, Katalysatorschichten und de- korative Schichten verwendet. Die volkswirtschaftliche Bedeutung der Oberflachen-und Diinnschicht-Technologie ist in den Industrielandem in den letzten J ahren aus folgenden Grunden erheblich ge- stiegen: - Viele Hochtechnologie-Anwendungen, an denen mikroelektronische, optische, op- toelektronische, magnetische oder kryoelektronische Bauelemente beteiligt sind, wur- den durch die vielfach einzigartigen physikalischen und chemischen Eigenschaften diinner Schichten iiberhaupt erst moglich.


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Product Details
  • ISBN-13: 9783540167235
  • Publisher: Springer
  • Publisher Imprint: Springer
  • Height: 244 mm
  • No of Pages: 334
  • Series Title: Wft Werkstoff-Forschung Und -Technik
  • Sub Title: Teil I: Beschichtungen Von Oberflächen
  • Width: 170 mm
  • ISBN-10: 3540167234
  • Publisher Date: 16 Apr 1987
  • Binding: Paperback
  • Language: German
  • Returnable: Y
  • Spine Width: 19 mm
  • Weight: 616 gr


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