Polymers in Microlithography Book by Takao Iwayanagi
Polymers in Microlithography

Polymers in Microlithography


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About the Book

This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes. Its 26 chapters are divided into three sections covering chemically applied resist chemistry, multilevel resist chemistry and processing, and novel chemistry and processes for microlithography. Each section contains an introduction written by a recognized expert in the field.


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Product Details
  • ISBN-13: 9780841217010
  • Publisher: American Chemical Society
  • Publisher Imprint: American Chemical Society
  • Height: 234 mm
  • No of Pages: 433
  • Series Title: ACS Symposium
  • Sub Title: Materials and Processes
  • Width: 152 mm
  • ISBN-10: 0841217017
  • Publisher Date: 05 May 1989
  • Binding: Hardback
  • Language: English
  • Returnable: Y
  • Spine Width: 25 mm
  • Weight: 775 gr


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Polymers in Microlithography
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Polymers in Microlithography
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