Processos microelectrónicos para o fabrico de VLSI
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Processos microelectrónicos para o fabrico de VLSI

Processos microelectrónicos para o fabrico de VLSI


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About the Book

O livro "Micro-electronic Processes for VLSI Fabrication" é um guia completo e autorizado que analisa os princípios fundamentais e as técnicas avançadas utilizadas no fabrico de circuitos integrados de muito grande escala (VLSI). Abrangendo um vasto leque de tópicos, o livro começa com uma introdução aprofundada à tecnologia de semicondutores de silício, incluindo uma panorâmica dos materiais semicondutores, estrutura cristalina do silício, semicondutores intrínsecos e extrínsecos e os meandros da dopagem e da concentração de portadores. Os capítulos subsequentes aprofundam aspectos cruciais do fabrico de VLSI, explorando técnicas de processamento de bolachas, tais como crescimento, preparação, inspeção de defeitos e vários métodos de limpeza de bolachas. O processo crítico de oxidação é abordado em pormenor, explicando as técnicas de oxidação térmica, seca e húmida, bem como os modelos de crescimento de óxidos. O livro examina extensivamente os métodos de deposição epitaxial, incluindo a deposição química de vapor (CVD), a epitaxia por feixe molecular (MBE) e a epitaxia selectiva. A implantação e a difusão de iões, processos fundamentais para o fabrico de dispositivos semicondutores, são também meticulosamente discutidas, com informações sobre os processos de implantação de iões.


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Product Details
  • ISBN-13: 9786206369752
  • Publisher: KS Omniscriptum Publishing
  • Binding: Paperback
  • Language: Portuguese
  • Returnable: N
  • Weight: 390 gr
  • ISBN-10: 6206369757
  • Publisher Date: 22 Aug 2023
  • Height: 229 mm
  • No of Pages: 228
  • Spine Width: 13 mm
  • Width: 152 mm


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