Strömungstechnische Auslegung Reinraumtauglicher Fertigungseinrichtungen
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Strömungstechnische Auslegung Reinraumtauglicher Fertigungseinrichtungen

Strömungstechnische Auslegung Reinraumtauglicher Fertigungseinrichtungen


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About the Book

Die vorliegende Arbeit entstand wihrend meiner Tiitigkeit als wissenschaftlicher Mitarbeiter am Fraunhofer-Institut flir Produktionstechnik und Automatisierung (IPA), Stuttgart. Die Untersuchungen wurden anteilig mit Mitteln des Bundes- ministeriums flir Forschung und Technologie (BMFT), Projekttriigerschaft "Halb- leiterfertigungsgerlite" gefOrdert. Mein besonderer Dank gilt dem Leiter des Instituts, Herrn Professor Dr. -Ing. H. -J. Warnecke, flir seine groBziigige Unterstiitzung und Forderung, die entscheidend zur erfolgreichen Durchflihrung dieser Arbeit beigetragen haben. Herrn Professor Dr. -Ing. H. Bach danke ich flir die Ubernahme des Mitberichtes, flir die eingehende Durchsicht und flir die wertvollen Hinweise, die sich daraus ergaben. Aus dem groBen Kreis der Kollegen am Institut, die mich durch ihre Mitarbeit und anregende Kritik unterstiitzt haben, - mi)chte ich die Herren Dr. -Ing. J. GeiSinger, DipI. -Ing. J. SchlieBer, Dr. -Ing. M. Schweizer, P. Baumbusch und Prof. Dr. -Ing. R-D. Schraft besonders erwihnen. Ihnen allen gilt mein herzlicher Dank. Stuttgart, Januar 1992 Elmar Degenhart Inhaltsverzeichnis Abkiirzungen und Formelzeichen 13 1 Einleitung 15 1. 1 Problemstellung 15 1. 2 Zielsetzung und Vorgehensweise 16 2 Stand der Technik 17 2. 1 Begriffe und Definitionen 17 2. 1. 1 Reinraumtechnologie 17 2. 1. 2 Reinheitsldassen 17 2. 1. 3 Reinraum 18 2. 2 Ausgangssituation 21 2. 2. 1 Kontaminationsquellen im Reinraum 21 Stromungsverhaltnisse im Reinraum 2. 2. 2 23 2. 2. 3 Stromungstechnische Untersuchungsmethoden 24 Quantitative Methoden 2. 2. 3. 1 24 2. 2. 3. 2 Qualitative Methoden der Stromungssichtbarmachung 26 2. 2. 4 Fertigungsgeratetechnik 29 3 Entwicklungsscbwerpunkte 33 3.


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Product Details
  • ISBN-13: 9783540554783
  • Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
  • Binding: Paperback
  • Language: German
  • Returnable: Y
  • Spine Width: 8 mm
  • Width: 140 mm
  • ISBN-10: 3540554785
  • Publisher Date: 21 Apr 1992
  • Height: 216 mm
  • No of Pages: 137
  • Series Title: IPA-Iao - Forschung Und Praxis
  • Weight: 231 gr


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