Technologie MEMS Book by Anjli Sharma - Bookswagon
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Technologie MEMS

Technologie MEMS


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About the Book

Depuis la découverte de la microcolonne par Chang en 1980, les microcolonnes miniaturisées ont suscité un immense intérêt en raison de leurs diverses applications, telles que la lithographie directe par faisceau d'électrons, les dispositifs à faible coût, les SEM à faible tension et les SEM portables, en raison de leur rendement élevé. La taille compacte permet aux microcolonnes d'être assemblées en réseau, ce qui améliore considérablement les performances d'imagerie ou le débit de la capacité de lithographie. Nous avons fabriqué et étudié trois modèles différents de micro-colonnes, tous utilisant la lentille source modifiée, une distance de travail différente et avec ou sans objectif. La qualité de l'image et le courant de sonde de toutes les microcolonnes nouvellement fabriquées ont été étudiés. Les lentilles électrostatiques ont été fabriquées par la technique MEMS. L'émetteur de champ 2D-CNT a été utilisé comme émetteur de source pour ces colonnes. Nos résultats suggèrent que parmi les trois structures de microcolonnes, la microcolonne ultraminiaturisée présente le courant de sonde le plus élevé ( 9,5 nA). Une microcolonne ultraminiaturisée peut être un candidat prometteur pour la prochaine génération d'outils de lithographie, car sa conception est plus adaptée à une microcolonne intégrée à l'échelle de la tranche que la microcolonne conventionnelle.


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Product Details
  • ISBN-13: 9786204156668
  • Publisher: Editions Notre Savoir
  • Binding: Paperback
  • Language: French
  • Returnable: N
  • Sub Title: Une approche pour fabriquer des lentilles électrostatiques minces
  • Width: 152 mm
  • ISBN-10: 6204156667
  • Publisher Date: 14 Oct 2021
  • Height: 229 mm
  • No of Pages: 92
  • Spine Width: 6 mm
  • Weight: 195 gr


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