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Tecnologia MEMS

Tecnologia MEMS


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About the Book

Desde a descoberta da microcoluna pela Chang em 1980, tem havido um imenso interesse na microcoluna miniaturizada devido às suas várias aplicações como a litografia de feixe eletrônico direto, dispositivo de baixo custo, baixa voltagem-SEM, e porportátil-SEM devido ao seu alto desempenho em termos de rendimento. O tamanho compacto permite que as microcolunas sejam montadas em forma de matriz, o que melhora significativamente o desempenho de imagem ou a capacidade de produção de litografia. Fabricamos e investigamos três projetos diferentes de microcolunas, todos utilizando a lente de fonte modificada, distância de trabalho diferente e com e sem lente objetiva. A qualidade da imagem e a corrente da sonda de todas as microcolunas recém-fabricadas foram investigadas. As lentes eletrostáticas foram fabricadas pela técnica MEMS. O emissor de campo 2D-CNT foi utilizado como emissor da fonte para estas colunas. Nosso resultado sugeriu que entre todas as três estruturas de microcolunas, a microcoluna ultraminiaturizada mostrou a maior corrente de sonda 9,5 nA. Uma microcoluna ultraminiaturizada pode ser um candidato promissor para a próxima geração de ferramentas litográficas, pois o projeto é mais adequado para a microcoluna integrada em escala de wafer do que a microcoluna convencional.


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Product Details
  • ISBN-13: 9786204156682
  • Publisher: Edicoes Nosso Conhecimento
  • Binding: Paperback
  • Language: Portuguese
  • Returnable: N
  • Sub Title: Uma abordagem para a fabricação de Lentes Electrostáticas Finas
  • Width: 152 mm
  • ISBN-10: 6204156683
  • Publisher Date: 14 Oct 2021
  • Height: 229 mm
  • No of Pages: 92
  • Spine Width: 6 mm
  • Weight: 199 gr


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